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Date: 20 September 2018
Micro- and Nano- Systems Cluster  

Topic Name: Micro- and Nano- Systems Cluster
Category: Electronics
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Research persons: Dr. Su Xiaodi

Location: 3, Research Link, Singapore 117602, Singapore


Micro- and Nano- Systems Cluster

The areas of focus for this cluster are non-silicon functional and structural
materials, techniques for micro and nano fabrication, materials integration –
both surfaces and interfaces, and process integration issues.
Microelectromechanical Systems (MEMS) and nanotechnology are also being utilised
in research on bioMEMs, polymer MEMs and microfluidics.
Sensor & Actuator

Our research on non-silicon functional and structural materials includes
membranes, sensor materials, materials for actuators, optical materials and
environmental resistance coatings.
Micromachining &

Fabricating structures in the micro or nano scale is a challenge,
particularly when non-silicon materials are used, or when making
three-dimensional features. Some of the fabrication techniques used by IMRE
include proton beam micromachining, focused ion beam and e-beam lithography,
laser micromachining, LIGA, microinjection moulding, stamping/embossing methods,
and direct patterning of liquids.
Interface Science
The need for advanced materials characterisation down to the atomic level has
always been critical in the physical sciences. There is now an awareness that
characterisation and the ability to manipulate matter on the atomic or molecular
scale will enable the creation of technology for a wide range of current and
future industries. Applications include areas like semiconductors, biomedicine
and sensor technology. The objective of our research is to understand the basic
physics and chemistry of materials at the atomic and nano scale.
Process Integration
Non-silicon micro- and nano- systems use a combination of materials that
could be functional, structural as well as processed and fabricated. Here, the
question of compatibility will be essential in the integration of novel design
with processes.
About Researcher
Dr.   Su Xiaodi
Research Scientist
3, Research Link, Singapore 117602
Email: xd-su@imre.a-star.edu.sg

Microelectromechanical Systems
Microelectromechanical systems (MEMS) is the technology of the very small,
and merges at the nano-scale into nanoelectromechanical systems (NEMS) and
Nanotechnology. MEMS are also referred to as micro machines, or Micro Systems
Technology (MST). MEMS are separate and distinct from the hypothetical vision of
Molecular nanotechnology or Molecular Electronics. MEMS generally range in size
from a micrometer (a millionth of a meter) to a millimeter (thousandth of a
meter). At these size scales, the standard constructs of classical physics do
not always hold true. Due to MEMS' large surface area to volume ratio, surface
effects such as electrostatics and wetting dominate volume effects such as
inertia or thermal mass. Finite element analysis is an important part of MEMS

The potential of very small machines was appreciated long before the technology
existed that could make them—see, for example, Feynmann's famous 1959 lecture
There's Plenty of Room at the Bottom. MEMS became practical once they could be
fabricated using modified semiconductor fabrication technologies, normally used
to make electronics. These include molding and plating, wet etching (KOH, TMAH)
and dry etching (RIE and DRIE), electro discharge machining (EDM), and other
technologies capable of manufacturing very small devices.

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